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ECE · Q141

VLSI Design And Testing

Engineering and GATE · ECE · question 141

Q141

To grow the polysilicon gate layer, which of the following chemical is used for chemical vapour deposition?

A.
Silicon Nitride (Si3N4)
B.
Silane gas (SiH4)
Answer
C.
Silicon oxide
D.
None of the mentioned

Answer: Option B

Solution

Answer: Option B
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